Direct measurement of contamination and etching rates in an electron beam
- 11 March 1976
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 9 (4) , 659-663
- https://doi.org/10.1088/0022-3727/9/4/016
Abstract
Changes in thickness of a carbon foil were monitored inside an electron microscope by measuring the energy-loss spectrum of transmitted electrons. As the temperature of the specimen is reduced, hydrocarbon contamination in the beam is superseded by a thinning effect, for which mechanisms are discussed.Keywords
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