Tetragonal zirconia growth by nanolaminate formation
- 27 June 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (26) , 3548-3550
- https://doi.org/10.1063/1.111220
Abstract
Multilayer films of polycrystalline zirconia and amorphous alumina were grown by reactive sputter deposition and characterized using x-ray diffraction and high resolution electron microscopy. We demonstrate that the layer spacing can be scaled to insure nanosize crystallites in the zirconia layer. The result is that nanolaminates with a high volume fraction of retained tetragonal zirconia are produced, independent of deposition parameters and without the addition of a stabilizing dopant.Keywords
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