Chemical vapour deposition of silicon carbide and its applications
- 1 April 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 126 (3-4) , 313-318
- https://doi.org/10.1016/0040-6090(85)90326-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The structure of chemical vapor deposited silicon carbideThin Solid Films, 1977
- Carbon, carbide and silicide coatingsThin Solid Films, 1976