Silicon particle growth in a fluidized‐bed reactor
- 1 May 1987
- journal article
- research article
- Published by Wiley in AIChE Journal
- Vol. 33 (5) , 784-791
- https://doi.org/10.1002/aic.690330511
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Fines in Fluidized Bed Silane PyrolysisJournal of the Electrochemical Society, 1984
- Kinetics and mechanism of the silane decompositionInternational Journal of Chemical Kinetics, 1979
- The Kinetics of Silicon Deposition on Silicon by Pyrolysis of SilaneJournal of the Electrochemical Society, 1974
- The pyrolysis of monosilaneProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1966