On the mixed group III and group V implantations in silicon and germanium
- 1 November 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 17 (4) , 325-330
- https://doi.org/10.1016/0168-583x(86)90120-5
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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