Hall-Effect and Photoluminescence Measurements of Oxygen-Related Donors in CZ-Si Crystals

Abstract
Electronic states of oxygen-related donors in CZ-Si crystals induced by heat treatment at 430°C have been investigated by Hall-effect and photoluminescence measurements. A characteristic change in the ionization energies of such heat-treatment induced oxygen-related donors has been observed, suggesting the formation of several species of oxygen clusters distributed in CZ-Si crystals. Photoluminescence spectra related to these oxygen-related donors reveal some new features characteristic of the luminescence from excitons localized at impurity pairs or clusters.