Laser chemical vapor deposition of metals and insulators
- 1 September 1979
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Quantum Electronics
- Vol. 15 (9) , 988-989
- https://doi.org/10.1109/jqe.1979.1070307
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Chemical vapor deposition of silicon using a CO2 laserApplied Physics Letters, 1978
- Theory of laser heating of solids: MetalsJournal of Applied Physics, 1976