The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
- 1 June 2000
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 65 (1-3) , 190-192
- https://doi.org/10.1016/s0925-4005(99)00301-9
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabricationIntegrated Ferroelectrics, 1995
- Electrodes for ferroelectric thin filmsIntegrated Ferroelectrics, 1993