Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication
- 1 February 1995
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 7 (1) , 61-73
- https://doi.org/10.1080/10584589508220221
Abstract
Hillock formation on Pt bottom electrode surfaces has been investigated for 〈111〉 Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.Keywords
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