Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions
- 15 February 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (4) , 1764-1772
- https://doi.org/10.1063/1.353212
Abstract
No abstract availableThis publication has 26 references indexed in Scilit:
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