Quantitative XPS-analysis of tantalum-containing amorphous carbon films
- 1 January 1989
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 333 (4-5) , 299-303
- https://doi.org/10.1007/bf00572308
Abstract
No abstract availableKeywords
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- Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysisSurface and Interface Analysis, 1981
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