Sputter deposition of NiTi thin film shape memory alloy using a heated target
- 13 June 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 370 (1-2) , 18-29
- https://doi.org/10.1016/s0040-6090(00)00947-0
Abstract
No abstract availableKeywords
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