Microminiaturization by thin film and solid circuit techniques
- 1 August 1962
- journal article
- Published by IOP Publishing in British Journal of Applied Physics
- Vol. 13 (8) , 384-392
- https://doi.org/10.1088/0508-3443/13/8/303
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A radioactive technique for the continuous measurement of film thickness in vacuum deposited gold filmsThe International Journal of Applied Radiation and Isotopes, 1962
- A high voltage photo-voltaic battery using a single silicon waferMicroelectronics Reliability, 1962
- The study of epitaxy in thin surface filmsAdvances in Physics, 1956