Computer studies of ionized cluster beam deposition
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 902-905
- https://doi.org/10.1016/0168-583x(89)90324-8
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 6 references indexed in Scilit:
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- Epitaxial growth of Al on Si(111) and Si(100) by ionized-cluster beamJournal of Applied Physics, 1984
- Theory of sputtering and comparison to experimental dataNuclear Instruments and Methods in Physics Research, 1982
- Transformations and Averaging Processes for Differential Cross-Section Measurements at Thermal EnergiesThe Journal of Chemical Physics, 1968