Hybrid ultrasonic elastic force motors micromachined in silicon
- 1 March 1995
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 8 (1-2) , 25-34
- https://doi.org/10.1080/10584589508012297
Abstract
A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication process for the stator resonator compatible with both bulk micromachining and 0.3 μm PZT films deposition on a SiNx/Ta/Pt substrate has been tested. Comparison of PZT actuated and previously fabricated ZnO actuated diaphragms are performed using laser interferometry. PZT samples show promising results for applications where a low voltage operation is a key benefit. Poled PZT films are obtained after process completion and influence of DC biases on the resonance frequencies are observed.Keywords
This publication has 5 references indexed in Scilit:
- Ultrasonic micromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Piezoelectric position sensor for ultrasonic EFM motorsSensors and Actuators A: Physical, 1994
- Chemical etching of thin film PLZTFerroelectrics, 1992
- The constituent equations of piezoelectric heterogeneous bimorphsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982