Metallorganic vapor phase epitaxy reactor for i n s i t u optical investigations
- 1 January 1988
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 59 (1) , 167-171
- https://doi.org/10.1063/1.1139995
Abstract
A metallorganic vapor phase epitaxy apparatus was built for in situ optical investigations of the gas phase. The quartz reactor lies on a support designed to move in a controlled, steady manner with respect to the optical path. The precision of the displacement is 0.01 mm. Temperature profiles above the substrate were established from the rotation spectra of H2 and N2 molecules.Keywords
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