Diffusion-induced nucleation model for the formation of porous silicon
- 15 October 1995
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 52 (15) , 11125-11131
- https://doi.org/10.1103/physrevb.52.11125
Abstract
We propose a diffusion-induced nucleation model for the formation of porous silicon based on two primary processes. The diffusion of holes from the bulk to the surface is controlled mainly by (a) the depletion-layer width (ΔW) and (b) the drift-diffusion length (l) of holes inside the lattice. The relevance of the two control parameters is discussed in the context of the existing physical models. We also consider pore propagation as a self-avoiding random walk with a finite termination probability . Pore morphologies obtained for both p- and n-type substrates are in agreement with TEM micrographs. Further, our model reproduces experimentally observed phenomena such as (i) a constant rate of growth, (ii) the dependence of the rate of growth on the anodization potential, (iii) high-porosity structures similar to samples exhibiting visible photoluminescence, and (iv) electropolishing of silicon in the high-potential limit. The effect of quantum confinement on porosity is illustrated.
Keywords
This publication has 25 references indexed in Scilit:
- Luminescent porous silicon synthesized by visible light irradiationApplied Physics Letters, 1993
- Porous silicon formation mechanismsJournal of Applied Physics, 1992
- Visible electroluminescence from porous siliconApplied Physics Letters, 1992
- Porous silicon membranesApplied Physics Letters, 1991
- Porous silicon formation: A quantum wire effectApplied Physics Letters, 1991
- Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafersApplied Physics Letters, 1990
- An experimental and theoretical study of the formation and microstructure of porous siliconJournal of Crystal Growth, 1985
- Kinetics and mechanism of porous layer growth during n-type silicon anodization in HF solutionSurface Technology, 1983
- Application of Preferential Electrochemical Etching of Silicon to Semiconductor Device TechnologyJournal of the Electrochemical Society, 1970
- Electrolytic Shaping of Germanium and SiliconBell System Technical Journal, 1956