Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 356-359
- https://doi.org/10.1109/sensor.1995.721820
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Analysis of closed-loop control of parallel-plate electrostatic microgrippersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- Squeeze-film damping in solid-state accelerometersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990