Coherent electron nanodiffraction from perfect and imperfect crystals
- 1 November 1993
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine A
- Vol. 68 (5) , 1055-1078
- https://doi.org/10.1080/01418619308219387
Abstract
The theory of coherent electron nanodiffraction from strained crystals is developed, based on the column approximation. Contributions to the diffraction pattern from different parts of the crystal under the illumination are considered, and a treatment of high-order weak reflections and diffuse scattering is given based on perturbation theory. Ultimate limits to the spatial resolution of coherent electron nanodiffraction in electron microscopy are discussed. A relationship between higher order Laue zone line width, probe size and specimen thickness is given, based on the uncertainty principle. Failure conditions of the column approximation for coherent convergent beam electron diffraction are tested by numerical simulations using the multislice method applied to a supercell containing a simulated strain field. The results and their implications are discussed. Phase determination of dynamical beams using overlapping orders is shown to require greater source coherence than that which is needed under single scattering conditions. The symmetry of coherent nanodiffraction patterns is shown to depend on probe position within a unit cell for all focus settings which fill the illumination aperture.Keywords
This publication has 26 references indexed in Scilit:
- Measurement of individual structure-factor phases with tenth-degree accuracy: the 00.2 reflection in BeO studied by electron and X-ray diffractionActa Crystallographica Section A Foundations of Crystallography, 1993
- Transmission-electron Fourier imaging of crystal lattices using low-voltage field-emission sources: TheoryPhysical Review B, 1992
- Absorptive form factors for high-energy electron diffractionActa Crystallographica Section A Foundations of Crystallography, 1990
- Convergent beam diffraction studies of interfaces, defects, and multilayersJournal of Electron Microscopy Technique, 1989
- Visibility of single heavy atoms on thin crystalline silicon in simulated annular dark-field STEM imagesActa Crystallographica Section A Foundations of Crystallography, 1988
- Three-dimensional strain-field information in convergent-beam electron diffraction patternsActa Crystallographica Section A, 1982
- Scanning transmission electron microscopy: microanalysis for the microelectronic ageJournal of Physics F: Metal Physics, 1981
- Approximations for dynamical calculations of microdiffraction patterns and images of defectsActa Crystallographica Section A, 1978
- The principles and practice of the weak‐beam method of electron microscopyJournal of Microscopy, 1973
- Dynamical theory of diffraction applicable to crystals with any kind of small distortionActa Crystallographica, 1962