Surface damage produced by sputtering of silicon
- 1 April 1972
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 7 (4) , 473-474
- https://doi.org/10.1007/bf02403412
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Rapid profile measurements in ion implanted siliconJournal of Physics E: Scientific Instruments, 1972
- Study of Radiation Damage in Silicon with the Scanning Electron MicroscopeNature, 1970
- Thin foils of non-metals made for electron microscopy by sputter-etchingJournal of Materials Science, 1970
- Observation of ion bombardment damage in siliconPhilosophical Magazine, 1968