Residual stress and mechanical properties of boron-doped p+-silicon films
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 866-871
- https://doi.org/10.1016/0924-4247(90)87048-n
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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