The structure of ultrathin oxide on silicon
- 15 August 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 37 (4) , 392-394
- https://doi.org/10.1063/1.91954
Abstract
30‐Å‐thick oxide on silicon has been examined in cross section by high‐resolution electron microscopy. The oxide thickness was uniform to within 5 Å, even though the oxide undulated up to 8 Å in height and with about 50 Å periodicity.Keywords
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