Structure, Composition, and Properties of Mocvd ZrO2 Thin Films
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Decomposition Chemistry of TetraethoxysilaneJournal of the American Ceramic Society, 1989
- Zirconia Coating on Stainless Steel Sheets from Organozirconium CompoundsJournal of the American Ceramic Society, 1989
- Contributions of Gas Phase Reactions to CVD ProcessesMRS Proceedings, 1988
- Transformation tougheningJournal of Materials Science, 1982
- Thin films of metal oxides on silicon by chemical vapor deposition with organometallic compounds. IJournal of Crystal Growth, 1972
- Preparation and Properties of Pyrolytic Zirconium Dioxide FilmsJournal of the Electrochemical Society, 1971