Scanning electron microscopy of the geometry of V-groove structures
- 1 July 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 12 (1) , 1-7
- https://doi.org/10.1016/0250-6874(87)87001-4
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Three‐dimensional graphical reconstruction from HVEM stereoviews of biological specimens by means of a microcomputerBiology of the Cell, 1985
- Electron microscope study of surface topography by geometrical determination of metric characteristics of surface elementsJournal of Microscopy, 1985
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978
- A theoretical approach to the errors in SEM photogrammetryScanning, 1978
- VMOS—A new MOS integrated circuit technologySolid-State Electronics, 1974
- Anisotropic Etching of SiliconJournal of Applied Physics, 1969