Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma
- 12 August 1996
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 77 (7) , 1286-1289
- https://doi.org/10.1103/physrevlett.77.1286
Abstract
The induced radio frequency magnetic fields of a low-frequency inductively coupled plasma are measured and modeled. The fields penetrate deep into the discharge, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations show that the enhanced penetration is due to a reduction of the plasma conductivity by the induced magnetic fields.Keywords
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