Organic/inorganic thin films deposited from diethoxydimethylsilane by plasma enhanced chemical vapor deposition
- 1 June 1999
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 248 (2-3) , 235-246
- https://doi.org/10.1016/s0022-3093(99)00249-5
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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