Mass Spectral Investigation of the Radio-Frequency Plasma Deposition of Hexamethyldisiloxane
- 1 May 1997
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 101 (18) , 3614-3619
- https://doi.org/10.1021/jp970663b
Abstract
No abstract availableKeywords
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