Micro-Raman study of thermoelastic stress distribution in oxidized silicon membranes and correlation with finite element modeling
- 30 April 1997
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 46 (1-3) , 24-28
- https://doi.org/10.1016/s0921-5107(96)01925-3
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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