Surface contamination detection below the ppb range on silicon wafers
- 1 June 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 89 (1) , 39-42
- https://doi.org/10.1016/0022-0248(88)90069-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Purification and impurity detection in silicon for microelectronicsJournal of Crystal Growth, 1986