Novel low temperature hard coatings for large parts
- 10 December 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 49 (1-3) , 330-335
- https://doi.org/10.1016/0257-8972(91)90078-b
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Activation of reactive sputtering by a plasma beam from an unbalanced magnetronVacuum, 1988
- Charged particle fluxes from planar magnetron sputtering sourcesJournal of Vacuum Science & Technology A, 1986
- A high rate sputtering process for the formation of hard friction-reducing TiN coatings on toolsThin Solid Films, 1982