Photoluminescence from Microcrystalline Silicon and Related Materials
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Intense photoluminescence has been obtained from nanocrystal-line silicon prepared in completely dry processing by the optimizing the crystallite size and the chemical passivation of the grain boundaries due to a controlled postoxidation of the plasma deposited films.Keywords
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