Fabrication process of pzt piezoelectric cantilever unimorphs using surface micromachining
- 1 February 1997
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 15 (1-4) , 325-332
- https://doi.org/10.1080/10584589708015723
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin FilmPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- An aqueous, low temperature process for synthesizing PZT(53,47) thin filmsIntegrated Ferroelectrics, 1993
- Integrated silicon microbeam PI-FET accelerometerIEEE Transactions on Electron Devices, 1982
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979