Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 413-416
- https://doi.org/10.1109/sensor.1995.717224
Abstract
Micromachined silicon cantilever beams actuated by the converse piezoelectric effect are of great interest for actuator applications [1], and for the characterization of piezoelectric thin films [2]. In this work a study of the mechanical response of piezoelectrically operated heterogeneous bimorph structures is given and compared with finite elements simulations. Determination of the piezoelectric parameter d/sub 31/ using interferometric displacement measurements, electrical impedance measurements, and finite element calculation will be discussed.Keywords
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