The epitaxial growth of silver and gold films by sputtering
- 1 April 1964
- journal article
- other
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 9 (100) , 703-707
- https://doi.org/10.1080/14786436408211882
Abstract
The growth of epitaxial films by evaporation of both metals and non-metals has been considered by many workers (Pashley 1956, Bassett et al. 1959). Little attention has been paid to the growth of sputtered films, although Chopra et al. (1963) have reported that epitaxial films of gold can be grown by sputtering onto mica substrates at temperatures above 280°C.Keywords
This publication has 4 references indexed in Scilit:
- Electron microscopy and diffraction of twinned structures in evaporated films of goldPhilosophical Magazine, 1963
- A mechanism for the formation of twins in evaporated face-centred cubic metal filmsPhilosophical Magazine, 1963
- Electrical Resistivity of Thin Single-Crystal Gold FilmsJournal of Applied Physics, 1963
- The study of epitaxy in thin surface filmsAdvances in Physics, 1956