Novel approach for synthesizing Ge fine particles embedded in glass by ion implantation: Formation of Ge nanocrystal in SiO2-GeO2 glasses by proton implantation
- 26 September 1994
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (13) , 1632-1634
- https://doi.org/10.1063/1.112934
Abstract
Nanometer‐sized crystalline Ge colloid particles have been formed by implantation of protons into substrate glasses having a composition of 1 GeO2‐9SiO2 to a fluence of 1×1018 cm−2 at an energy of 1.5 MeV at room temperature without post‐thermal annealing. Intensities of the absorption band due to Ge particles reach a maximum at ∼30 μm from the surface and their depth profile is close to that of the electronic energy loss. No formation of Si particles was observed in SiO2 or SiO2:GeO2 glasses implanted with protons at the same conditions and fluence.Keywords
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