A novel method to avoid sticking of surface-micromachined structures
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 659-662
- https://doi.org/10.1016/s0924-4247(97)80033-7
Abstract
No abstract availableKeywords
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