Elastic and inelastic energy deposition distributions during ion implantation in solids
- 1 January 1983
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 69 (3-4) , 165-177
- https://doi.org/10.1080/00337578308217821
Abstract
A method for the numerical solution of integr-differential equations governing the parameters of ion implantation and energy deposition distributions is described. The influence of the choice of elastic scattering cross-section approximation on the results of damage and ionization distribution calculations is shown. A comparison with some experimental data and Brice's calculations is carried out. The applicability of the Pearson IV distribution function for the construction of the damage profiles is demonstrated.Keywords
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