Passively aligned hybrid integration of 8 x 1 micromachined micro-Fresnel lens arrays and 8 x 1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect
- 1 September 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (9) , 1031-1033
- https://doi.org/10.1109/68.414692
Abstract
Surface micromachining technique has been successfully applied to the fabrications of a three-dimensional 8/spl times/1 micro-Fresnel lens array and other novel three-dimensional alignment structures. With the help of these three-dimensional structures, self-aligned integration of the micro-Fresnel lens array and an 8/spl times/1 vertical-cavity surface-emitting laser (VCSEL) array is realized for the first time with passive alignment. Individual addressing of the VCSEL/micro-lens element is also successfully demonstrated. With their three-dimensional and array structural characteristics, they are very attractive for free-space optical interconnect and other integrated micro-optical systems.<>Keywords
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