A silicon force sensor for robotics and medicine

This publication has 24 references indexed in Scilit:

• Tactile imaging
  Sensors and Actuators A: Physical, 1992
• Tactile sensing: Technology and applications
  Sensors and Actuators A: Physical, 1991
• A 1024-element high-performance silicon tactile imager
  IEEE Transactions on Electron Devices, 1990
• Tactile sensory monitoring of clinician-applied forces during delivery of newborns
  IEEE Transactions on Biomedical Engineering, 1988
• Tactile sensors and the gripping challenge: Increasing the performance of sensors over a wide range of force is a first step toward robotry that can hold and manipulate objects as humans do
  IEEE Spectrum, 1985
• MOS Integrated silicon pressure sensor
  IEEE Transactions on Electron Devices, 1985
• Automated Tactile Sensing
  The International Journal of Robotics Research, 1982
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity
  IEEE Transactions on Electron Devices, 1982
• An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
  IEEE Transactions on Biomedical Engineering, 1973