Secondary-ion emission from vanadium as a function of incident ion mass and energy in the range25–275keV
- 1 February 1987
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 35 (4) , 1485-1491
- https://doi.org/10.1103/physrevb.35.1485
Abstract
Measurements of the intensities of low-energy secondary ions emitted from clean and oxidized polycrystalline vanadium surfaces under (25–275)-keV , , , and bombardment are reported. Whereas the intensities of the metallic-ion species are observed to be proportional to the sputtering yield of vanadium and, therefore, dependent on elastic energy deposition, the intensities of ions are not. Rather, they increase linearly with increasing projectile velocity in a manner similar to the electronic stopping power or, equivalently, to the yield of secondary electrons. While the production of metallic ions may be described adequately by a number of the proposed models of secondary-ion emission, that of cannot. The possibility that is produced by a mechanism similar to electron-stimulated desorption is discussed.
Keywords
This publication has 20 references indexed in Scilit:
- Mechanisms of atomic ion emission during sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Secondary ion emission from V and Al surfaces under keV light ion on bombardmentNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Secondary ion emission from oxidized vanadium as a function of projectile energy in the range 10–90 MeVNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- A comparison of secondary ion mass spectra from keV and MeV ion bombarded vanadium, niobium and copperNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- A comparison of secondary ion emission from polycrystalline metals under MeV and keV heavy ion bombardmentNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Emission of Non-Metallic Ions from a Metal Surface under Heavy-Ion BombardmentPhysica Scripta, 1983
- Remarks on Some Factors Influencing the Charge State of Sputtered ParticlesPhysica Scripta, 1983
- Ion-stimulated desorption of positive halogen ionsPhysical Review B, 1981
- Experimental and theoretical approaches to the ionization process in secondary-ion emissionSurface Science, 1979
- The sputtering process and sputtered ion emissionSurface Science, 1979