A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. 38 (8) , 758-768
- https://doi.org/10.1109/10.83588
Abstract
A method is described for the manufacture of a three-dimensional electrode array geometry for chronic intracortical stimulation. This silicon based array consists of a 4.2*4.2*0.12 mm thick monocrystalline substrate, from which project 100 conductive, silicon needles sharpened to facilitate cortical penetration. Each needle is electrically isolated from the other needles, and is about 0.09 mm thick at its base and 1.5 mm long. The sharpened end of each needle is coated with platinum to facilitate charge transfer into neural tissue. The following manufacturing processes were used to create this array: thermomigration of 100 aluminum pads through an n-type silicon block, creating trails of highly conductive p/sup +/ silicon isolated from each other by opposing pn junctions; a combination of mechanical and chemical micromachining which creates individual penetrating needles of the p/sup +/ silicon trails; metal deposition to create active electrode areas and electrical contact pads; and array encapsulation with polyimide.<>Keywords
This publication has 17 references indexed in Scilit:
- A silicon based electrode array for intracortical stimulation: structural and electrical propertiesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Accelerated Testing of Polyimide Coatings for Neural ProsthesesPublished by American Chemical Society (ACS) ,1989
- Silicon based microstructures suitable for intracortical electrical stimulation (visual prosthesis application)Published by Institute of Electrical and Electronics Engineers (IEEE) ,1988
- Microfabrication technology for development of chronic neural information transducersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986
- Printed circuit microelectrodesTrends in Neurosciences, 1979
- Photolithographic Fabrication and Physiological Performance of Microelectrode Arrays for Neural StimulationIEEE Transactions on Biomedical Engineering, 1978
- Deep-diode arraysJournal of Applied Physics, 1976
- Phosphenes produced by electrical stimulation of human occipital cortex, and their application to the development of a prosthesis for the blindThe Journal of Physiology, 1974
- Mechanical Factors in the Design of Chronic Recording Intracortical MicroelectrodesIEEE Transactions on Biomedical Engineering, 1973
- The sensations produced by electrical stimulation of the visual cortexThe Journal of Physiology, 1968