Lithographic technique using radiation‐induced grafting of acrylic acid into poly(methyl methacrylate) films
- 1 November 1980
- journal article
- Published by Wiley in Polymer Engineering & Science
- Vol. 20 (16) , 1069-1072
- https://doi.org/10.1002/pen.760201606
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Polymer Resist Systems for Photo- And Electron LithographyAnnual Review of Materials Science, 1976
- Radiation Chemistry of Monomers, Polymers, and PlasticsPhysics Today, 1974