Correlation between electron trap density and hydrogen concentration in ultrathin rapidly reoxidized nitrided oxides
- 29 February 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (9) , 736-738
- https://doi.org/10.1063/1.99364
Abstract
Ultrathin nitrided oxides (8 nm) were reoxidized for the first time by lamp-heated rapid thermal annealing in dry oxygen at 900–1150 °C for 15–200 s. Extensive measurements of hydrogen concentration [H] using secondary ion mass spectroscopy were performed. Electron trapping was monitored by flatband voltage shift ΔVfb under high-field stress. Both [H] and the ΔVfb decrease monotonically as reoxidation proceeds in the present experimental conditions. We have found for the first time that the ΔVfb is correlated with the [H] by a single proportional relation regardless of the fabrication condition. This fact gives evidence that the electron traps in the (reoxidized) nitrided-oxide system originate from hydrogen-containing species.Keywords
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