Computer simulation of sputtering
- 1 August 1970
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 32 (5) , 303-304
- https://doi.org/10.1016/0375-9601(70)90515-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Sputtered atom ejection patterns from (100) Ge surfacesPhilosophical Magazine, 1970
- Additional Information on ``Computer Simulation of Sputtering''Journal of Applied Physics, 1969
- Comments on ``Computer Simulation of Sputtering''Journal of Applied Physics, 1969
- Computer Simulation of SputteringJournal of Applied Physics, 1968
- The role of focusing collisions in sputteringCanadian Journal of Physics, 1968
- Structures of Clean Surfaces of Germanium and Silicon. IJournal of Applied Physics, 1963