Sputtering of Au, Csl and LiNbO3 by multiply charged Ar ions
- 1 July 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 42 (3) , 307-316
- https://doi.org/10.1016/0168-583x(89)90440-0
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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