High-efficiency waveguide-coupled lambda =1.3 mu m In/sub x/Ga/sub 1-x/As/GaAs MSM detector exhibiting large extinction ratios at L and X band
- 1 May 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 5 (5) , 514-517
- https://doi.org/10.1109/68.215266
Abstract
The design and fabrication of a 1.3- mu m waveguide-coupled strained-layer In/sub x/Ga/sub 1-x/As/GaAs MSM detector with an optimized active layer thickness is reported. For 100- mu m-long devices, a responsivity of 0.58 mA/mW is observed. Using the detector as an optoelectronic switch, on/off ratios better than 40 dB were achieved at L and X band.Keywords
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