Generation of faultless multi-pinhole masks by means of spatial filtering
- 31 March 1975
- journal article
- Published by Elsevier in Optics Communications
- Vol. 13 (3) , 268-272
- https://doi.org/10.1016/0030-4018(75)90097-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Tomosynthesis: A holographic method for variable depth displayOptics Communications, 1973
- Removal of nonperiodic structures from a periodic image by means of spatial filteringOptics Communications, 1971
- Inspection of integrated circuit photomasks with intensity spatial filtersProceedings of the IEEE, 1969