Silicon self-diffusion in thin SiO2 and PtSi films
- 1 May 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 79 (1) , 61-68
- https://doi.org/10.1016/0040-6090(81)90428-4
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
- Crystallography of PtSi films on (001) siliconJournal of Applied Physics, 1978
- Silicon Oxidation Studies: The Role of H 2 OJournal of the Electrochemical Society, 1977
- Silicon Oxidation Studies: Analysis of SiO2 Film Growth DataJournal of the Electrochemical Society, 1976
- Thermal stability of thin PtSi films on silicon substratesJournal of Applied Physics, 1972
- Solid-Solid Reactions in Pt–Si SystemsJournal of Applied Physics, 1972
- LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUMApplied Physics Letters, 1971
- The formation and devitrification of oxides on siliconJournal of Materials Science, 1966
- General Relationship for the Thermal Oxidation of SiliconJournal of Applied Physics, 1965
- Thermal Oxidation of Heavily Doped SiliconJournal of the Electrochemical Society, 1965
- The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and SteamJournal of the Electrochemical Society, 1963