Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System
- 1 January 1988
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 28 (2) , 157-167
- https://doi.org/10.1002/ctpp.2150280207
Abstract
No abstract availableKeywords
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