Glow Discharge Sputter Deposition
- 1 January 1978
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 353 references indexed in Scilit:
- Electrical properties and stabilization of sputtered films by inert gas precipitationThin Solid Films, 1976
- Ion migration effects in r.f. “sputter cleaning” of dielectric filmsThin Solid Films, 1974
- Mass spectrometric investigations of background gases during the sputtering of tantalumThin Solid Films, 1973
- Variations du pourcentage de ZnS dans des solutions solides de ZnxCd1−xS obtenues par pulvérisation cathodique reactiveThin Solid Films, 1973
- Reactivity sputtered tantalum thin film resistors Part 1. Physical and electrical propertiesThin Solid Films, 1971
- Die Analyse monomolekularer FestkörperoberflÄchenschichten mit Hilfe der SekundÄrionenemissionThe European Physical Journal A, 1970
- Zum Mechanismus der Ionenbildung und Ionenemission bei der FestkörperzerstÄubungThe European Physical Journal A, 1969
- Determination of the argon content of sputtered SiO2 films by X-ray fluorescenceThin Solid Films, 1969
- Liditabsorption und elektrische Eigenschaften stark gestörter CdO-SchichtenThe European Physical Journal A, 1954
- Irreversible änderungen der Elektronenbeweglichkeit in dünnen CdO-SchichtenThe European Physical Journal A, 1954